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ULVAC
 

Dry Pump Oil Rotary Vacuum Pumps
ER Series Energy-Saving Dry Pumps X D-240DK Series Oil Rotary Vacuum Pumps (240 l/min)
X Dry Pumps LR/HR Series X PVD Series Oil Rotary Vacuum Pumps (155 to 372 l/min)
X Eco-Shock Power-Saving Attachment X VD Series Oil Rotary Vacuum Pumps (500 to 800 l/min)
  X PKS Series Oil Rotary Vacuum Pumps (1,600 to 7,000 l/min)
  X VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
  X YM-VD, YM-VS Series Evacuation Systems (1,580 to 20,000 l/min)
  X TM/TMX Series Oil Mist Traps
   
Mechanical Booster Pumps Ion Pumps
PMB-B/C Series Mechanical Booster Pumps X PST-030CU/AU Acter Pumps
PRC-A Series Mechanical Booster Pumps X PST-050CU/AU Acter Pumps
  X PST-100CX/100AX Acter Pumps
  X PST-200CX2/200AX2 Acter Pumps
  X PST-400CX2/400AX2 Acter Pumps
  X GST-03L Ion Pump Control
  X Coaxial Ion Pump
   
Turbo Molecular Pump Oil Diffusion Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps X ULK Series Oil Diffusion Pumps
YTP Series Turbo Molecular Pump Evacuation Units  
UTM Series Pivot Bearing Type Turbo Molecular Pumps  
   
Cryo Pumps Other Pumps
Cryo Pumps (ULVAC CRYOGENICS, Inc.) X PGT Series Titanium Getter Pumps
  X GGT-3 Power Supply for Titanium Getter Pumps
   
Vacuum Valves Vacuum Gauges
X VULP-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Pneumatic Operation and Bellows Shaft Seals

X G-Tran Series

X VULP-F Series Ultra-High Vacuum L-Valves (Vacuum Flange Type) With Pneumatic Operation and Bellows Shaft Seals

X G-Tran Series Pirani Gauge Measuring Units

X VULP-KF Series Ultra-High Vacuum L-Valves (KF Flange Type) With Pneumatic Operation and Bellows Shaft Seals

X G-Tran Series Hot Cathode Gauge Box Unit

X VUGP-CS Series Ultra-High Vacuum Gate Valves (Conflat Flange Type) With Pneumatic Operation and Bellows Shaft Seals VUGP-CS

X G-Tran Series Cold Cathode Gauge Measuring Units

X VUGP-F Series Ultra-High Vacuum Gate Valves (Vacuum Flange Type) With Pneumatic Operation and Bellows Shaft Seals

X G-Tran Series Single Display Units

X VLP-US-KF Series High Vacuum L-Valves (With KF Flanges) With Pneumatic Operation and O-Ring Shaft Seals

X G-Tran Series 4-Channel Display Units

X VLP-U/US Series High Vacuum L-Valves (Vacuum Flange Type) With Pneumatic Operation and O-Ring Shaft Seals

X OCTIE Display Unit for Wide Range Vacuum Gauges

X VLH-U/US Series High Vacuum L-Valves (Vacuum Flange Type) With Manual Operation and O-Ring Shaft Seals

X OCTIE Sensor Unit/Box Unit Wide Range Vacuum Gauges

X VLH-US-KF Series High Vacuum L-Valves (KF Flange Type) With Manual Operation and O-Ring Shaft Seals

X Pirani Vacuum Gauge GP-G Series

X VAH Series High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals

X GP-1000G Digital Pirani Vacuum Gauge

X VLHC Series Vacuum L-Valves (Vacuum Flange Type) With Manual Operation and O-Ring Shaft Seals

X GI-TL3/GI-TL3RY Analog Ionization Vacuum Gauges

X VSHC Series Vacuum Straight Valves (Vacuum Flange Type) With Manual Operation and O-Ring Shaft Seals

X GI-D7/GI-N8 Digital Ionization Vacuum Gauges

X VULH-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals

X GI-M2 Metal Ionization Vacuum Gauge

X VULH-F Series Ultra-High Vacuum L-Valves (Vacuum Flange Type) With Manual Operation and Bellows Shaft Seals

X AxTRAN Extremely High Vacuum Gauge

X VAP Series High Vacuum Gate Valves With Pneumatic Operation and O-Ring Shaft Seals

X GI-PA/GI-PARY Analog Penning Vacuum Gauges

X VLP-US-KF Series High Vacuum L-Valves (With KF Flanges) With Pneumatic Operation and O-Ring Shaft Seals

X GM-1000/GM-2000 Ceramic Capacitance Manometer Controllers

X VLP-U/US Series High Vacuum L-Valves (Vacuum Flange Type) With Pneumatic Operation and O-Ring Shaft Seals

X CCM-A Series Ceramic Capacitance Manometers

X VLH-U/US Series High Vacuum L-Valves (Vacuum Flange Type) With Manual Operation and O-Ring Shaft Seals  
X VLH-US-KF Series High Vacuum L-Valves (KF Flange Type) With Manual Operation and O-Ring Shaft Seals  
X VAH Series High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals  
X VLHC Series Vacuum L-Valves (Vacuum Flange Type) With Manual Operation and O-Ring Shaft Seals  
X VSHC Series Vacuum Straight Valves (Vacuum Flange Type) With Manual Operation and O-Ring Shaft Seals  
X VULH-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals  
X VULH-F Series Ultra-High Vacuum L-Valves (Vacuum Flange Type) With Manual Operation and Bellows Shaft Seals  
X VULH-KF Series Ultra-High Vacuum L-Valves (KF Flange Type) With Manual Operation and Bellows Shaft Seals  
X VUGH-CS Series Ultra-High Vacuum Gate Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals  
X VUGH-F Series Ultra-High Vacuum Gate Valves (Vacuum Flange Type) With Manual Operation and Bellows Shaft Seals  
X 10AI Series Manual Ultra-High Vacuum Air Inlet Valves  
X VUH Series Manual Ultra-High Vacuum Metal Valves (Conflat Flange Type)  
X VUH-MVF Manual Ultra-High Vacuum Mini Valve (Conflat Flange Type)  
   
Gas Analyzers Leak Detectors
X NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM X Leak Tester HELIOT model 101
X NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM X Leak Tester HELIOT model 102
X Software for Gas Analysis Qulee QCS X Leak Tester HELIOT model 103
X MALIN Compact Partial Pressure Monitor X Leak Detector HELIOT 700 Series
X REGA Residual Gas Monitors X Helium Leak Tester (COMPACT-ALT) CLT
X SEPION 2 Ultra-High Vacuum Residual Gas Monitors  
X REPROS Process Monitors for Reaction Gas  
X HIRESOM High-Resolution Quadrupole Mass Spectrometer  
   
Film Thickness / Surface Profile Measurement Flanges
X ESM Series Automatic Ellipsometers X UFC Series Ultra-High Vacuum Flanges
X Dektak 6M Stylus Surface Profiler X Ultra-High Vacuum Conversion Flanges
X Dektak 8 Stylus Surface Profiler  
X CRTM-6000 Quartz Crystal Deposition Controller  
X CRTM-9000 Quartz Crystal Deposition Controller  
X CRTS-12 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller  
X MESEC Non-Contact Metal Film Thickness Measurement System  
   
Parts Power Supplies / EB Gun
X TVU-FV Series Ultra-High Vacuum Zero Length Viewing Windows X RFS-A Series RF Power Supplies
X TDU Series Ultra-High Vacuum Rotary Feedthroughs X RGN-1302 RF Power supply
X TSU Series Ultra-High Vacuum Linear Feedthroughs X DCL Series DC Power Supplies for Sputtering
X CMS Series Electrical Feedthroughs X DCS series DC Power Supplies
  X HPS Series EB Power Supplies
  X EGK/EGL/EGO Series EB gun for vacuum evaporation
   
Vacuum Robot & Cluster
X Vacuum Robot COVOT  
X Vacuum Robot KEYTRAN-IV Z  
X Small Vacuum Transfer Module NCH-mono  
X Vacuum Cluster Tool Integration Platform NCH-4000  
X Vacuum Transfer Module NCP-6000  
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